Niestandardowy system pozycjonowania z podstawą do mikroskopu OEM
stable granite and iron cast stand
with manual z-adjustment
high performance stepper motion controller
with joystick and serial interface
XY Stage GT8, Rotary Stage RT5, Wafer-Chuck WC6
precise xy stage GT8 with 200 x 200 mm stroke
rotary stage RT5 with high round- and
flat runout below 5 µm
wafer-chuck WC6 for 4-12" wafer wafer-chuck with vacuum-fixture
for 12", 10", 8", 6" and 4" wafer